WebRapid thermal processing ( RTP) is a semiconductor manufacturing process which heats silicon wafers to temperatures exceeding 1,000°C for not more than a few seconds. During cooling wafer temperatures must be brought down slowly to prevent dislocations and wafer breakage due to thermal shock. WebThe most widespread approach involves heating the wafer using banks of tungsten-halogen lamps because these provide a convenient, efficient and fast-reacting thermal source that is easily controlled. In a typical RTP system , the wafer is heated by two banks of linear lamps — one above and one below it.
What is HTP? What is LTP? Why Should I Care? - Learn Stage
WebRapid Thermal ProcessingPerformance just as OEM. Rapid Thermal Processing. We offer new parts such as ball bearings for AMAT XE, sapphire probes and gold sleeves. We carry … WebHIGH-PERFORMANCE MULTI-ZONE RTP LAMP MODULES The known RTP systems mostly employ single-zone lamps for wafer heating. The lamp module is usually designed to … flagship private wealth ameriprise
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